Elemental mercury-containing probe card
AssigneeInternational Business Machines Corporation
InventorEffendi Leobandung
Life of this patent
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Abstract
A probe card apparatus for wafer testing of a wafer under test, and a method of using the probe card for wafer testing. The probe card includes a printed circuit board having wafer testing circuitry. The probe card also includes a probe array including a slab having a plurality of probes, wherein each probe includes a volume of electrically-conductive fluid contained within a corresponding perforation of the slab that extends between a first surface and a second surface of the slab, wherein a first surface of each volume of electrically-conductive fluid substantially coincides with the first surface of the slab.
Claims19
A method of using a probe card apparatus for wafer testing, the method comprising:
- loading a wafer under test into a wafer prober, the wafer comprising a plurality of solder bumps and the wafer prober comprising a test head interconnected to the probe card;
- aligning the probe card with respect to the wafer based on a pattern formed by the plurality of solder bumps, the pattern being formed with respect to one or more surfaces of the wafer;
- and
- testing the wafer by causing contact between a plurality of probes of the probe card and the plurality of solder bumps, the caused contact establishing an electromechanical interface between the wafer prober and the wafer during testing, wherein the probe card comprises:
- a printed circuit board having wafer testing circuitry interconnected to the wafer prober;
- and
- a probe array comprising a slab having the plurality of probes, wherein each probe comprises a volume of electrically-conductive fluid contained within a corresponding perforation of the slab that extends between a first surface and a second surface of the slab, wherein a first surface of each volume of electrically-conductive fluid substantially coincides with the first surface of the slab.
A probe card apparatus for wafer testing of a wafer under test, the probe card comprising:
- a printed circuit board having wafer testing circuitry;
- and
- a probe array comprising a slab having a plurality of probes, wherein each probe comprises a volume of electrically-conductive fluid contained within a corresponding perforation of the slab that extends between a first surface and a second surface of the slab, wherein a first surface of each volume of electrically-conductive fluid substantially coincides with the first surface of the slab.
Dependencies are inferred from the claim text.