Multi-member test probe structure

A system comprising:

• a memory to store instructions;
• a processor coupled to the memory, the processor to execute the instructions to test a device under test (DUT);
• and
• a plurality of probes attached to a substrate, wherein a probe of the plurality of probes comprises a plurality of members, wherein individual members of the plurality of members comprises a first end attached to the substrate and a second end opposite the first end,
• wherein the second ends of the plurality of members of the probe define a space, and
• wherein the space defined by the second ends of the plurality of members is to receive an interconnect structure of the DUT.

A method comprising:

• forming a photoresist material over a substrate;
• and
• forming a first member and a second member of a probe on the substrate, wherein forming the first member and the second member comprises:
• forming a mask on the photoresist material, the mask comprising an opening,
• first exposing a first section of the photoresist material to a light source through the opening, while the substrate is at a first angle with respect to the light source,
• shifting the mask relative to the substrate, and
• second exposing a second section of the photoresist material to the light source through the opening, while the substrate is at a second angle with respect to the light source and subsequent to shifting the mask.