Measuring Device for a Scanning Probe Microscope, Scanning Probe Microscope and Method for Scanning Probe Microscopic Determination of One or More Test Samples with a Scanning Probe Microscope

A method for the scanning probe microscope determination of one or more measurement samples using a scanning probe microscope comprising:

• providing a scanning probe microscope with a measuring probe and a first probe holding device on which the measuring probe is arranged;
• and
• scanning probe microscope determination of one or more measurement samples by means of a first and a second measurement arrangement of the scanning probe microscope, wherein the second measurement arrangement differs from the first measurement arrangement and wherein here in each case
• light beams which are provided by a measurement light source of a detection device are emitted onto a reflection device assigned to the measuring probe;
• and
• measurement light beams which upon incidence of the light beams on the reflection device assigned to the measuring probe are reflected by this device, are received by means of a sensor device of the detection device;
• wherein
• the light beams and the measurement light beams run along a respective optical beam path during the scanning probe microscope determination of the measurement sample;
• in the first measurement arrangement, the detection device and the first probe holding device with the measuring probe are arranged in a first position spacing from one another and
• in order to form the second measuring arrangement, a lengthening device is changeably arranged between the detection device and the measuring probe which lengthens the respective optical beam path for the light beams and the measurement light beams in such a manner that the first or a second probe holding device which is different from the first probe holding device is arranged with the measuring probe at a second position spacing from the detection device which is greater than the first position spacing.