Photoacoustic sensor, method for checking a gas-tightness, and system
AssigneeInfineon Technologies AG
InventorsMatthias Eberl, Franz Jost, Stefan Kolb
Life of this patent
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AssigneeInfineon Technologies AG
InventorsMatthias Eberl, Franz Jost, Stefan Kolb
Estimating the term…
An example of a system comprises a volume filled with a gas, a gas excitation device configured to excite the gas inside the volume, a microphone configured to output a microphone signal on the basis of the gas excited by the gas excitation device, and a testing unit configured to take the microphone signal as a basis for testing a gas-tightness of the volume. An example of a photoacoustic sensor comprises a hermetically sealed sensor cell, a gas excitation device and a testing unit configured to take the microphone signal dependent on the thermally excited gas as a basis for testing a gas-tightness of the sensor cell. One example comprises a method for testing a gas-tightness of a volume filled with a gas.
1-18. (canceled)
A photoacoustic sensor, comprising:
A method for testing a gas-tightness of a hermetically sealed sensor cell of a photoacoustic sensor filled with a gas, comprising:
A photoacoustic sensor, comprising:
Dependencies are inferred from the claim text.