Defect inspection device, defect inspection method, and program

A defect inspection device comprising:

• an image acquisition unit that acquires a received light image created on the basis of transmitted light or reflected light of an inspection object obtained by irradiating the inspection object with radiation;
• an input unit that receives an input of a physical feature including at least a material of the inspection object;
• an exposure condition acquisition unit that acquires an exposure condition of the radiation;
• a storage unit that stores exposure information that is a relationship among the physical feature, an irradiation condition of the radiation, and shading of the received light image;
• a parameter determination unit that determines an image processing parameter for the received light image on the basis of the exposure condition acquired by the exposure condition acquisition unit, the physical feature received by the input unit, and the exposure information stored in the storage unit;
• an image processing unit that extracts a defect candidate image which is an image corresponding to a defect candidate of the inspection object from the received light image by performing image processing of the received light image on the basis of the image processing parameter determined by the parameter determination unit;
• and
• a thickness calculation unit that calculates a thickness of each local area of the inspection object on the basis of the received light image acquired by the image acquisition unit, the exposure condition acquired by the exposure condition acquisition unit, and the exposure information stored in the storage unit,
• wherein the storage unit further stores a noise level according to the thickness of the inspection object, and
• the parameter determination unit determines the image processing parameter for each local area of the inspection object from the thickness of each local area of the inspection object calculated by the thickness calculation unit and the noise level stored in the storage unit.

A defect inspection method comprising:

• an image acquisition step of acquiring a received light image created on the basis of transmitted light or reflected light of an inspection object obtained by irradiating the inspection object with radiation;
• an input step of receiving an input of a physical feature including at least a material of the inspection object;
• an exposure condition acquisition step of acquiring an exposure condition of the radiation;
• a storage step of storing exposure information that is a relationship among the physical feature, an irradiation condition of the radiation, and shading of the received light image;
• a parameter determination step of determining an image processing parameter for the received light image on the basis of the exposure condition acquired in the exposure condition acquisition step, the physical feature received in the input step, and the exposure information stored in the storage step;
• an image processing step of extracting a defect candidate image which is an image corresponding to a defect candidate of the inspection object from the received light image by performing image processing of the received light image on the basis of the image processing parameter determined in the parameter determination step;
• and.
• a thickness calculation step of calculating a thickness of each local area of the inspection object on the basis of the received light image acquired in the image acquisition step, the exposure condition acquired in the exposure condition acquisition step, and the exposure information stored in the storage step,
• wherein the parameter determination step determines the image processing parameter corresponding the thickness of each local area of the inspection object calculated in the thickness calculation step.

A defect inspection method comprising:

• an image acquisition step of acquiring a received light image created on the basis of transmitted light or reflected light of an inspection object obtained by irradiating the inspection object with radiation;
• an input step of receiving an input of a physical feature including at least a material of the inspection object;
• an exposure condition acquisition step of acquiring an exposure condition of the radiation;
• a storage step of storing exposure information that is a relationship among the physical feature, an irradiation condition of the radiation, and shading of the received light image;
• a parameter determination step of determining an image processing parameter for the received light image on the basis of the exposure condition acquired in the exposure condition acquisition step, the physical feature received in the input step, and the exposure information stored in the storage step;
• an image processing step of extracting a defect candidate image which is an image corresponding to a defect candidate of the inspection object from the received light image by performing image processing of the received light image on the basis of the image processing parameter determined in the parameter determination step;
• and.
• a thickness calculation step of calculating a thickness of each local area of the inspection object on the basis of the received light image acquired in the image acquisition step, the exposure condition acquired in the exposure condition acquisition step, and the exposure information stored in the storage step,
• wherein the storage step includes further storing a noise level according to the thickness of the inspection object, and
• the parameter determination step includes determining the image processing parameter for each local area of the inspection object from the thickness of each local area of the inspection object calculated in the thickness calculation step and the noise level stored in the storage step.