Methods and apparatus to calibrate micro-electromechanical systems
AssigneeTexas Instruments Incorporated
InventorsMohammad Hadi Motieian Najar, Ira Oaktree Wygant
Life of this patent
Estimating the term…
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AssigneeTexas Instruments Incorporated
InventorsMohammad Hadi Motieian Najar, Ira Oaktree Wygant
Estimating the term…
An example pressure sensor calibration apparatus includes a pressure chamber in which a first pressure sensor is to be disposed; one or more first sensors to determine a capacitance value from the first pressure sensor from a physical test performed on the first pressure sensor; the one or more first sensors to determine a first pull-in voltage value from a first electrical test performed on the first pressure sensor; a correlator to determine correlation coefficient values based on the capacitance value determined during the physical test on the first pressure sensor and the first pull-in voltage value determined during a first electrical test on the first pressure sensor; and a calibrator to determine calibration coefficient values to calibrate a second pressure sensor based on the correlation coefficient values and a second electrical test on the second pressure sensor.
A pressure sensor calibration apparatus, comprising:
A method of calibrating a pressure sensor, comprising:
A tangible machine-readable storage disk or storage device comprising instructions which, when executed, cause a machine to at least:
Dependencies are inferred from the claim text.