Pressure difference sensor for determining a pressure measurement signal
AssigneeEndress + Hauser GmbH + Co. KG
InventorsTimo Kober, Benjamin Lemke
Life of this patent
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AssigneeEndress + Hauser GmbH + Co. KG
InventorsTimo Kober, Benjamin Lemke
Estimating the term…
A pressure difference sensor for determining a pressure measurement signal includes a measuring cell made from a semiconductor material. The measuring cell is suppliable with first and second pressures and, using an electrical transducer element, outputs the pressure measurement signal as a function of a difference between the first and second pressures. First and second stiffening elements of a ceramic or semiconductor material are each joined with the pressure difference measuring cell by a respective first or second joining layer and have a respective first or second duct, via which the respective first or second pressure is suppliable to the pressure difference measuring cell. The first and/or the second joining layer comprise(s) an electrically conductive material and serve(s) for the mechanical connecting of the pressure difference measuring cell with the first and second stiffening elements and for implementing an electrical functionality.
1-13. (canceled)
A pressure difference sensor for determining a pressure measurement signal, comprising:
Dependencies are inferred from the claim text.