Vacuum pump
AssigneeEdwards Limited
InventorPaul Milner
Life of this patent
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Abstract
Turbomolecular stator components include an array of stator blades, arranged to interact with pumped gases. Spacers are used to locate the stator blade array and couple the stator blade array to a housing. The stator components include an outer section that is resilient and arranged to cooperate with the spacers.
Claims10
A turbo-molecular vacuum pump comprising:
- a housing for accommodating rotor and stator components of the turbo-molecular vacuum pump having an inlet side and an outlet side,
- a drive shaft coupled to the rotor components for driving the rotor components around a longitudinal axis,
- bearing means for coupling the drive shaft to the housing and to allow relative rotary movement thereof, and
- a spacer for locating and coupling the stator components relative to the housing;
- wherein each of said stator components comprises a series of stator blades extending radially from the longitudinal axis and between an inner portion to an outer portion, each of the stator blades being angled with respect to a plane defined by the inner portion,
- characterised in that the outer portion of at least one of the stator component comprises a resilient portion arranged to cooperate with the spacer.
A stator blade array for a turbo-molecular vacuum pump, comprising a series of stator blades extending radially from an inner portion to an outer portion, each of the stator blades being angled with respect to a plane defined by the inner portion, characterised in that the outer portion of the stator blade array comprises a resilient portion arranged to cooperate with a spacing ring or a housing of a turbo-molecular pump.
(canceled)
Dependencies are inferred from the claim text.