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AssigneesValstybinis Moksliniu Tyrimu Institutas Fiziniu Ir Technologijos Mokslu Centras, Lidaris, Uab
InventorsAndrius MELNINKAITIS, Tomas TOLENIS
Estimating the term…
A Coating, a system of coatings and a method to produce thin film coating, deposited by a stream of particles, produced by thermal evaporation or magnetron/ion-beam sputtering, wherein the thin film coating comprises at least 3 distinct refractive index layers, out of a single target (10) material. In the process of the coating, vapor flux or particle stream is pointed obliquely to the uncovered surface of the substrate (1), which can be rotated about an axis (12), parallel to the surface of the substrate. The substrates can also be rotated about an axis (16), co-aligned with the normal vector of the substrate, to obtain an evenly deposited coating with the desired amorphous structure. The structure of the coating is selected in a pattern, which allows the porosity in-between adjacent layers to be varied. As a consequence, achieving a reflectance of the coating of at least 90% for at least one frequency radiation or polarization component.
A multilayer dielectric coating having a refractive index modulation as a function of coating thickness, where an energy band gap of the coating material is 6 eV or higher and the refractive index modulation is realized by depositing the same target material and obtaining different porosity, characterized in that the entire coating or at least an upper surface region is formed to have an amorphous structure and a coating reflection coefficient, which is higher than 90% for at least one frequency of radiation or one polarization component.
A method of forming the dielectric coating comprising at least steps of:
An optical component comprising at least a substrate and a multilayer dielectric coating, which comprises three or more dielectric material layers, which are deposited one above the other and have a varying porosity (and refractive index, respectively), characterized in that the layers of dielectric material are formed to have an amorphous structure and the reflection coefficient of a fully formed multilayer coating is higher than 90% for at least one radiation frequency or polarization component.
Dependencies are inferred from the claim text.