Sapphire thin film coated substrate
AssigneeHong Kong Baptist University
InventorsKok Wai CHEAH, Wing Yui LAM, Hoi Lam TAM
Life of this patent
Estimating the term…
Abstract
A method to transfer a layer of harder thin film substrate onto a softer, flexible substrate. In particular, the present invention provides a method to deposit a layer of sapphire thin film on to a softer and flexible substrate e.g. quartz, fused silica, silicon, glass, toughened glass, PET, polymers, plastics, paper and fabrics. This combination provides the hardness of sapphire thin film to softer flexible substrates
Claims20
A sapphire-coated substrate made by a method comprising:
- an e-beam evaporation or sputtering deposition process at room temperature or 25° C., wherein sapphire is deposited directly on to a substrate selected from quartz, fused silica, silicon, glass, or toughened glass to form the sapphire-coated substrate, wherein the substrate during deposition is without external cooling or heating;
- and
- an annealing process, wherein said sapphire-coated substrate is annealed under an annealing temperature ranging between approximately room temperature or 25° C. and 2040° C. for an effective duration of time.
A composition of sapphire coating on to a substrate comprising sapphire being deposited as a sapphire thin film and a doping element being a unique identifier of said sapphire coating for doping said sapphire thin film to form a doped sapphire thin film, wherein said doping element comprises one or more of chromium, chromium oxide, magnesium, magnesium oxide, beryllium, beryllium oxide, lithium, lithium oxide, sodium, sodium oxide, potassium, potassium oxide, calcium, calcium oxide, molybdenum, molybdenum oxide, silicon, silicon oxide, tungsten, tungsten oxide, zinc and zinc oxide.
Dependencies are inferred from the claim text.