Adhesive with Tunable Porosity and Methods to Support Temporary Bonding Applications
OwnerJohn Cleaon Moore, Jared Michael Pettitinventors
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OwnerJohn Cleaon Moore, Jared Michael Pettitinventors
Estimating the term…
Methods and compositions are described for a temporary adhesive used to affix a work unit onto a carrier substrate whereby its porosity is tuned by choosing and adjusting the polymeric resin and filler components to provide sufficient adhesion to support a manufacturing process, and upon completion, there is advanced penetration of a liquid into the interfacial bond causing release of the work unit without harm. The temporary adhesive provides a tunable porosity that is dependent upon the mathematical calculation of the weight basis ratio of filler to binder, that is preferably greater than 1.0, more preferably greater than 2.0, and most preferably greater than 3.0. The temporary adhesive may be applied and cured in a variety of ways that meet the needs of the form of the work unit and objectives of the manufacturing process. The invention provides benefits of flexibility and reduced cost when establishing practices to handle difficult work units in the manufacture of semiconductors and flat panel displays.
An attach and release process using a temporary adhesive with tunable porosity to affix a work unit onto a carrier substrate, whereby subsequent to a manufacturing process, the porosity of the temporary adhesive allows the penetration of a liquid into the interfacial bond and releases the work unit without harm and without the need for a subsequent cleaning process by:
An attach and release process using a temporary adhesive with tunable porosity to affix a work unit onto a carrier substrate, whereby subsequent to a manufacturing process, the porosity of the temporary adhesive allows the penetration of a liquid into the interfacial bond and releases the work unit without harm and without the need for a subsequent cleaning process by:
Dependencies are inferred from the claim text.