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US 2019/0169415 A1Published application
Composition and molded article
AssigneesAkita University, Daikin Industries, Ltd.
InventorsKazuya MATSUMOTO, Mitsutoshi JIKEI, Sumito YAMAKAWA, Tadatake SAKURADA, Fumihiro KAMIYA, Tsuyoshi NOGUCHI
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Abstract
The invention provides a composition capable of providing a molded article that has excellent heat resistance and a small weight change against oxygen plasma exposure and fluorine plasma exposure during a semiconductor manufacturing step. The composition contains a fluorine-containing polymer and a hyperbranched polymer of a cage silsesquioxane with a specific structure.
Claims9
A composition comprising:
- a fluorine-containing polymer;
- and
- a hyperbranched polymer of a cage silsesquioxane represented by the following formula (1):
- wherein R1 to R8 are each individually a hydrogen atom, a halogen atom, or an organic group, and at least one of R1 to R8 is an organic group.
1 more element
Dependencies are inferred from the claim text.