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US 2019/0169040 A1Published application
Method for producing inorganic oxide in form of thin film
AssigneeKao Corporation
InventorsTsuyoshi ODA, Ryo ONISHI
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Abstract
Provided is a method for producing an inorganic oxide in the form of a thin film, the method including a step of bringing a first liquid and a second liquid with each other, the first liquid containing an inorganic oxide precursor and the second liquid containing a substance reacting with the inorganic oxide precursor of the first liquid to form an inorganic oxide derived from the inorganic oxide precursor. The step is performed by continuous operation. At least one of the first liquid and the second liquid includes an ionic liquid.
Claims22
A method for producing an inorganic oxide in a form of a thin film, the method comprising
- bringing a first liquid and a second liquid into contact with each other, the first liquid containing an inorganic oxide precursor and the second liquid containing a substance reacting with the inorganic oxide precursor of the first liquid to form an inorganic oxide derived from the inorganic oxide precursor, wherein
- the bringing of the first liquid into contact with the second liquid is performed by continuous operation, and at least one of the first liquid and the second liquid includes an ionic liquid.
Dependencies are inferred from the claim text.