Graphene structure having nanobubbles and method of fabricating the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJiyeon KU, Wonhee Ko, Hyowon KIM
Life of this patent
Estimating the term…
Abstract
Example embodiments relate to graphene structures having nanobubbles, and/or to a method of manufacturing the graphene structure. The graphene structure includes a substrate and a graphene layer on the substrate, the graphene layer having a plurality of convex portions. One or more of the plurality of convex portions has a hollow structure, and the graphene layer has a band gap that is due to the plurality of convex portions. A noble gas is included between the substrate and the convex portions.
Claims8
-7. (canceled)
A method of manufacturing a graphene structure, the method comprising:
- preparing a graphene layer on a substrate;
- and
- forming a plurality of convex portions on the graphene layer by irradiating a noble gas onto the graphene layer.
-12. (canceled)
The method of claim 12, wherein the noble gas is Ar gas.
The method of claim 11, wherein the sputtering forms at least one noble gas between the substrate and each of the plurality of convex portions.
Dependencies are inferred from the claim text.