Microelectromechanical system (mems) device packaging
AssigneeKnowles Electronics, LLC
InventorsTony K. Lim, Norman Dennis Talag
Life of this patent
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Abstract
Systems, apparatuses, and methods for manufacturing a microelectromechanical system (MEMS) device. The MEMS device includes a substrate, a cap, a microelectromechanical component, and a tag. The cap is coupled to the substrate such that the substrate and the cap cooperatively define an interior cavity. One of the substrate or the cap defines a port. The microelectromechanical component is disposed within the interior cavity. The tag is coupled to the substrate and an exterior surface of the cap to secure the cap to the substrate.
Claims20
A microelectromechanical system (MEMS) device comprising:
- a substrate;
- a cap coupled to the substrate such that the substrate and the cap cooperatively define an interior cavity, wherein one of the substrate or the cap defines a port;
- a microelectromechanical component disposed within the interior cavity;
- and
- a non-continuous tag coupled to the substrate and the cap, wherein the non-continuous tag is positioned at one or more discrete locations along a periphery of the cap to secure the cap to the substrate.
A microelectromechanical system (MEMS) device comprising:
- a substrate;
- a cap coupled to the substrate such that the substrate and the cap cooperatively define an interior cavity, wherein one of the substrate or the cap defines a port;
- a microelectromechanical component disposed within the interior cavity;
- and
- a tag coupled to the substrate and an exterior surface of the cap to secure the cap to the substrate.
A populated printed-circuit-board (PCB) blank comprising:
- a substrate;
- a plurality of microelectromechanical devices positioned along the substrate, each of the plurality of microelectromechanical devices including:
- a lid coupled to the substrate, wherein the substrate and the lid cooperatively define an interior cavity;
- and
- a microelectromechanical component positioned within the interior cavity;
- and
- a plurality of tags, wherein each of the plurality of tags is positioned between adjacent microelectromechanical devices such that (i) at least a portion of a first end of each lid is secured to the substrate and (ii) at least a portion of an opposing second end of each lid is secured to the substrate.
Dependencies are inferred from the claim text.