Polishing apparatus and polishing method

A polishing method for polishing between a polishing pad and a polishable object disposed opposed to the polishing pad, the polishing method comprising:

• a step of holding the polishing pad using a polishing table;
• a step of driving to rotate the polishing table using a first electric motor;
• a step of driving to rotate a holding section for holding the polishable object and pressing the polishable object against the polishing pad using a second electric motor;
• a step of holding the holding section using a swing arm;
• a step of swinging the swing arm around a swing center on the swing arm using a third electric motor;
• a step of detecting a current value of one of the first, second and third electric motors and/or a torque command value of the one electric motor and generating a first output;
• and
• a step of increasing a change amount of the first output while swinging the polishable object around the swing center on the swing arm and polishing the polishable object, and detecting a change of a frictional force between the polishing pad and the polishable object.

A computer readable recording medium that records a program for causing a computer to control a polishing apparatus that can polish a polishable object, the polishing apparatus comprising:

• a first electric motor that can drive to rotate a polishing table that can hold a polishing pad;
• a second electric motor that can drive to rotate a holding section that can hold the polishable object and can press the polishable object against the polishing pad;
• a third electric motor that can swing a swing arm that holds the holding section around a swing center on the swing arm;
• and
• a detection section that can detect a current value of one of the first, second and third electric motors and/or a torque command value of the one electric motor and can generate a first output, and causing the computer to function as:
• change detection means that can detect a change of a frictional force between the polishing pad and the polishable object by increasing a change amount of the first output while swinging the polishable object around the swing center on the swing arm and polishing the polishable object;
• and
• control means that can control polishing by the polishing apparatus.