Gas purge unit and load port apparatus
AssigneeTDK Corporation
InventorsTadamasa IWAMOTO, Jun EMOTO
Life of this patent
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Abstract
A gas purge unit introduces a cleaning gas into a purge container with an opening therethrough. The gas purge unit includes a first blowout member second blowout member. The first blowout member is disposed along a lateral the opening and includes a first nozzle port. The first nozzle port blows the cleaning gas into the purge container. The second blowout member is disposed along the lateral side and includes a second nozzle port. The second nozzle port is disposed farther from the opening than the first nozzle port and blows the cleaning gas into the purge container. A load port apparatus includes the gas purge unit.
Claims17
A gas purge unit for introducing a cleaning gas into a purge container with an opening therethrough, comprising:
- a first blowout member disposed along a lateral side of the opening and including a first nozzle port configured to blow the cleaning gas into the purge container;
- and
- a second blowout member disposed along the lateral side and including a second nozzle port disposed farther from the opening than the first nozzle port and configured to blow the cleaning gas into the purge container.
A gas purge unit for introducing a cleaning gas into a purge container with an opening therethrough, comprising:
- a first nozzle port configured to blow the cleaning gas from a lateral side of the opening into the purge container;
- and
- a second nozzle port disposed farther from the opening than the first nozzle port and configured to blow the cleaning gas into the purge container.
Dependencies are inferred from the claim text.