Liquid discharge apparatus, imprint apparatus, and method

A liquid discharge apparatus comprising:

• a discharge head including a discharge portion configured to discharge a liquid;
• a cap configured to cap the discharge portion;
• a suction unit configured to suck an interior of the cap through a first fluid passage communicating with the interior of the cap in a state in which the cap caps the discharge portion;
• and
• an open/close unit configured to open/close a second fluid passage communicating with the interior of the cap, the open/close unit being set in an open state when a negative pressure state of the interior of the cap, which is generated by suction by the suction unit, is canceled,
• wherein the cap includes a bottom portion of the interior, which is formed to face the discharge portion,
• the second fluid passage includes an outlet passage portion formed in the cap and open to the interior of the cap, and
• a passage direction of the outlet passage portion is directed closer to the bottom portion than the discharge portion.

A liquid discharge apparatus comprising:

• a discharge head including a discharge portion configured to discharge a liquid;
• a cap configured to cap the discharge portion;
• a suction unit configured to suck an interior of the cap through a first fluid passage communicating with the interior of the cap in a state in which the cap caps the discharge portion;
• an open/close unit configured to open/close a second fluid passage communicating with the interior of the cap, the open/close unit being set in an open state when a negative pressure state of the interior of the cap, which is generated by suction by the suction unit, is canceled;
• and
• a restricting member arranged in the interior of the cap and configured to restrict generation of a fluid flow from the second fluid passage to the discharge portion.

An imprint apparatus comprising a liquid discharge apparatus for discharging a resin onto a substrate, the liquid discharge apparatus including:

• a discharge head including a discharge portion configured to discharge a liquid;
• a cap configured to cap the discharge portion;
• a suction unit configured to suck an interior of the cap through a first fluid passage communicating with the interior of the cap in a state in which the cap caps the discharge portion;
• an open/close unit configured to open/close a second fluid passage communicating with the interior of the cap, the open/close unit being set in an open state when a negative pressure state of the interior of the cap, which is generated by suction by the suction unit, is canceled;
• and
• a filter arranged in the second fluid passage.

An imprint apparatus comprising a liquid discharge apparatus for discharging a resin onto a substrate, the liquid discharge apparatus including:

• a discharge head including a discharge portion configured to discharge a liquid;
• a cap configured to cap the discharge portion;
• a suction unit configured to suck an interior of the cap through a first fluid passage communicating with the interior of the cap in a state in which the cap caps the discharge portion;
• and
• an open/close unit configured to open/close a second fluid passage communicating with the interior of the cap, the open/close unit being set in an open state when a negative pressure state of the interior of the cap, which is generated by suction by the suction unit, is canceled,
• wherein the cap includes a bottom portion of the interior, which is formed to face the discharge portion,
• the second fluid passage includes an outlet passage portion formed in the cap and open to the interior of the cap, and
• a passage direction of the outlet passage portion is directed closer to the bottom portion than the discharge portion.

An imprint apparatus comprising a liquid discharge apparatus for discharging a resin onto a substrate, the liquid discharge apparatus including:

• a discharge head including a discharge portion configured to discharge a liquid;
• a cap configured to cap the discharge portion;
• a suction unit configured to suck an interior of the cap through a first fluid passage communicating with the interior of the cap in a state in which the cap caps the discharge portion;
• an open/close unit configured to open/close a second fluid passage communicating with the interior of the cap, the open/close unit being set in an open state when a negative pressure state of the interior of the cap, which is generated by suction by the suction unit, is canceled;
• and
• a restricting member arranged in the interior of the cap and configured to restrict generation of a fluid flow from the second fluid passage to the discharge portion.

A method comprising:

• performing imprint by an imprint apparatus including a liquid discharge apparatus configured to discharge a resin onto a substrate;
• and
• processing the substrate having undergone the imprint,
• the liquid discharge apparatus including
• a discharge head including a discharge portion configured to discharge a liquid,
• a cap configured to cap the discharge portion,
• a suction unit configured to suck an interior of the cap through a first fluid passage communicating with the interior of the cap in a state in which the cap caps the discharge portion,
• an open/close unit configured to open/close a second fluid passage communicating with the interior of the cap, the open/close unit being set in an open state when a negative pressure state of the interior of the cap, which is generated by suction by the suction unit, is canceled, and
• a filter arranged in the second fluid passage.

A method comprising:

• performing imprint by an imprint apparatus including a liquid discharge apparatus configured to discharge a resin onto a substrate;
• and
• processing the substrate having undergone the imprint,
• the liquid discharge apparatus including
• a discharge head including a discharge portion configured to discharge a liquid,
• a cap configured to cap the discharge portion,
• a suction unit configured to suck an interior of the cap through a first fluid passage communicating with the interior of the cap in a state in which the cap caps the discharge portion, and
• an open/close unit configured to open/close a second fluid passage communicating with the interior of the cap, the open/close unit being set in an open state when a negative pressure state of the interior of the cap, which is generated by suction by the suction unit, is canceled,
• wherein the cap includes a bottom portion of the interior, which is formed to face the discharge portion,
• the second fluid passage includes an outlet passage portion formed in the cap and open to the interior of the cap, and
• a passage direction of the outlet passage portion is directed closer to the bottom portion than the discharge portion.

A method comprising:

• performing imprint by an imprint apparatus including a liquid discharge apparatus configured to discharge a resin onto a substrate;
• and
• processing the substrate having undergone the imprint,
• the liquid discharge apparatus including
• a discharge head including a discharge portion configured to discharge a liquid,
• a cap configured to cap the discharge portion;
• a suction unit configured to suck an interior of the cap through a first fluid passage communicating with the interior of the cap in a state in which the cap caps the discharge portion,
• an open/close unit configured to open/close a second fluid passage communicating with the interior of the cap, the open/close unit being set in an open state when a negative pressure state of the interior of the cap, which is generated by suction by the suction unit, is canceled, and
• a restricting member arranged in the interior of the cap and configured to restrict generation of a fluid flow from the second fluid passage to the discharge portion.