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US 2019/0168178 A1Published application
Apparatus and Method for Mixing Fluids with Degradational Properties
AssigneeVeeco Precision Surface Processing LLC
InventorsJohn Taddei, John Clark, Mark Yannuzzi, Laura Mauer, Paul Vit
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Abstract
An apparatus and method for mixing fluids with degradational properties are disclosed herein. The present system has been devised to safely and accurately dilute, heat and deliver a degradable fluid while simultaneously removing extraneous vapor, adding capability to monitor the temperature and capability to monitor the concentration of the diluted fluid.
Claims7
A method for mixing fluids with degradational properties comprising the steps of:
- selectively introducing a first fluid from to a first inlet of a mixing device from a first fluid circuit in which the first fluid flows, wherein the first fluid circuit contains a flow controller for controlling a flow rate of the first fluid within the first fluid circuit;
- controllably introducing a degradation fluid into a first port of the mixing device that is located downstream of the inlet thereby forming a first mixture in the mixing device;
- venting vapors from the first mixture through a vent formed in the mixing device;
- monitoring a temperature of the first mixture within the mixing device prior to the first mixture being discharged through an outlet;
- and
- sampling a volume of the first mixture by discharging the volume of the first mixture through a sampling port to a detector that is configured to measure a concentration of the first mixture prior to discharge through the outlet.
3 more elements
Dependencies are inferred from the claim text.