Physical quantity sensor, physical quantity sensor device, composite sensor device, inertial measurement unit, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorSatoru TANAKA
Life of this patent
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AssigneeSeiko Epson Corporation
InventorSatoru TANAKA
Estimating the term…
A inertial sensor includes a substrate, a fixed portion that is fixed to the substrate, a movable portion is connected to the fixed portion, and is displaceable in an X axis direction, and a movable electrode that is supported at the movable portion, and a frame part includes a first edge that is located on one side of the X axis direction, and is disposed along a Y axis direction, and a second edge that is located on the other side of the X axis direction, and is disposed along the Y axis direction. The fixed portion is disposed further toward the second edge than the first edge, and the substrate includes a first projection that overlaps the first edge, and is disposed to be separated from the first edge, and a second projection that overlaps the second edge, and is disposed to be separated from the second edge.
A physical quantity sensor comprising:
Dependencies are inferred from the claim text.