Light source for lithography exposure process

A lithography exposure system, comprising:

• a target fuel generator comprising:
• a storage member configured to store a target fuel and having an outlet for allowing the target fuel to flow out of the storage member;
• a support rotatably connected to the storage member;
• a first nozzle assembly and a second nozzle assembly coupled to the support, wherein each of the first nozzle assembly and the second nozzle assembly is configured to eject a droplet of the target fuel;
• and
• a laser generator configured to generate a laser pulse to hit the target fuel supplied by the target fuel generator;
• wherein when the support is at a first angle of rotation relative to the storage member, the first nozzle assembly is fluidly connected to the outlet to supply the droplet of the target fuel, and the second nozzle assembly is disengaged from the outlet;
• wherein when the support is at a second angle of rotation relative to the storage member, the second nozzle assembly is fluidly connected to the outlet to supply the droplet of the target fuel, and the first nozzle assembly is disengaged from the outlet.

A method for generating a radiation light in a lithography exposure system, comprising:

• connecting a first nozzle assembly coupled to a support to an outlet of a storage member that receives a target fuel inside;
• guiding the target fuel flowing through the first nozzle assembly and supplying a droplet of the target fuel into an excitation zone via the first nozzle assembly;
• moving the support to connect a second nozzle assembly coupled to the support with the outlet;
• guiding the target fuel flowing through the second nozzle assembly and supplying a droplet of the target fuel into the excitation zone via the second nozzle assembly;
• and
• irradiating the droplet of the target fuel in the excitation zone with a laser pulse.

The method as claimed in claimed 13, further comprising:

• generating an image of the droplet;
• performing an analysis of the image of the droplet and producing a detection signal according to the analysis of the image of the droplet;
• and
• stopping the supply of the target fuel via the first nozzle assembly when the detection signal is outside a range of acceptable values.