Non-contact probe and method of operation

A method of putting a point of interest on an object and an optical inspection system of a non-contact probe mounted on a positioning apparatus in a desired relationship, the method comprising:

• a user manually arranging the non-contact probe and object at a first relative configuration at which a marker feature, projected by the non-contact probe along a projector axis that is not coaxial with the optical inspection system's optical axis, identifies a point of interest;
• and
• subsequently, the positioning apparatus automatically moving the non-contact probe and/or object so as to put them at a second relative configuration at which the point of interest and optical inspection system are at the desired relationship.

A method of putting a point of interest on an object and an optical inspection system of a non-contact probe mounted on a positioning apparatus in a desired relationship, the method comprising:

• a user manually arranging the non-contact probe and object at a first relative configuration at which a marker feature, projected by the non-contact probe along a projector axis that is not coaxial with the optical inspection system's optical axis, identifies a point of interest;
• and
• operating the positioning apparatus such that subsequent manual relative movement of the non-contact probe and object is restricted so as to guide the non-contact probe and the identified point of interest on the object toward the desired relationship.

An apparatus for inspecting an object, comprising:

• a positioning apparatus;
• a non-contact probe mounted on the positioning apparatus comprising an optical inspection system having an optical axis and a projector configured to project a marker feature along a projector axis that is not coaxial with the optical axis;
• in which, based on an indicated point of interest on the surface of the object identified by the marker feature, the apparatus is configured to control the positioning apparatus so as to guide relative motion of the non-contact probe and/or an object to a relative configuration at which the indicated point of interest and optical inspection system are at a desired relationship.

An inspection apparatus comprising a non-contact probe mounted on a positioning apparatus, the non-contact probe comprising an optical inspection system having an optical axis and a projector configured to project a marker feature along a projector axis that is different to the optical axis, in which the apparatus is configured to determine, based on an indicated point of interest on the surface of the object identified by the marker feature, how to guide the non-contact probe and object to a relative configuration at which the optical inspection system and the indicated point of interest are at a desired relationship, and at which the projector axis intersects the surface of the object at the same position at which it intersected the surface of the object when the marker feature identified the indicated point of interest.