Multi-zone pedestal heater without vias

A support pedestal comprising:

• a substrate having a first surface and a second surface opposite the first surface;
• a top resistive layer disposed on the first surface of the substrate and defining a first set of zones;
• a bottom resistive layer disposed on the second surface of the substrate and defining a second set of zones;
• and
• a plurality of electric terminals,
• wherein each zone of the first and second set of zones is coupled to at least two electric terminals from among the plurality of electric terminals, and a number of electric terminals is less than or equal to a total of the first and second set of zones.

A support member comprising:

• a top resistive layer having at least two zones;
• a bottom resistive layer disposed in a different plane than that of the top resistive layer, the bottom resistive layer having at least two zones;
• a main substrate disposed between the upper and bottom resistive layer;
• and
• a plurality of electric terminals, wherein at least two electric terminals from among the plurality of electric terminals are disposed on the same plane as at least one of the top resistive layer and the bottom resistive layer,
• wherein each zone of the top and bottom resistive layer is coupled to at least two electric terminals from among the plurality of electric terminals and a number of electric terminals is less than or equal to a total number of zones of the top and bottom resistive layer.