Imprint apparatus, imprint method, and article manufacturing method

An imprint method comprising:

• applying a plurality of resin drops on a substrate using a plurality of ejection ports of a dispenser;
• bringing the resin and a mold into contact;
• and
• transferring a contoured pattern that is formed in the mold to the resin,
• wherein, in the bringing, the resin and the mold are brought into contact in a state that an array direction of the plurality of resin drops aligned on the substrate by the plurality of ejection ports arrayed in a predetermined direction is angled with respect to a principal axis direction of the contoured pattern of the mold;
• and
• wherein the contoured pattern has recessed portions having a length direction and a width direction and the principal axis direction is in the length direction of recessed portions of the contoured pattern.

An article manufacturing method comprising:

• forming a pattern of a resin on a substrate using an imprint apparatus;
• and
• processing the substrate on which the pattern has been formed in the forming to obtain the article from the processed substrate,
• the forming comprising:
• applying a plurality of resin drops on a substrate using a plurality of ejection ports of a dispenser;
• bringing the resin and a mold into contact;
• and
• transferring a contoured pattern that is formed in the mold to the resin,
• wherein, in the bringing, the resin and the mold are brought into contact in a state that an array direction of the plurality of resin drops aligned on the substrate by the plurality of ejection ports arrayed in a predetermined direction is angled with respect to a principal axis direction of the contoured pattern of the mold;
• and
• wherein the contoured pattern has recessed portions having a length direction and a width direction and the principal axis direction is in the length direction of recessed portions of the contoured pattern.