Retaining ring design
AssigneeApplied Materials, Inc.
InventorsJeonghoon OH, Charles C. GARRETSON, Eric LAU, Andrew NAGENGAST, Steven M. ZUNIGA, Edwin C. SUAREZ, Huanbo ZHANG, Brian J. BROWN
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AssigneeApplied Materials, Inc.
InventorsJeonghoon OH, Charles C. GARRETSON, Eric LAU, Andrew NAGENGAST, Steven M. ZUNIGA, Edwin C. SUAREZ, Huanbo ZHANG, Brian J. BROWN
Estimating the term…
Embodiments herein relate to a retaining ring for use in a polishing process. The retaining ring includes an annular body having an upper surface and a lower surface. An inner surface is connected to the upper surface and the lower surface. The inner surface includes one or more surfaces that are used to retain a substrate during processing. The one or more surfaces have an angle relative to a central axis of the retaining ring. The inner surface also includes a plurality of facets. Channels are disposed within the retaining ring to allow passage of a polishing fluid from an inner surface to an outer surface of the retaining ring disposed opposite of the inner surface.
A retaining ring, comprising:
A retaining ring, comprising:
A retaining ring, comprising:
Dependencies are inferred from the claim text.