High-voltage capacitor, system including the capacitor and method for manufacturing the capacitor

A system, comprising:

• a first electronic circuit configured to generate an output signal having a first voltage and a frequency;
• a second electronic circuit, coupled to the first electronic circuit, and configured to accept at an input a signal having a second voltage lower than the first voltage;
• and
• a capacitor coupled between the first electronic circuit and the second electronic circuit, the capacitor being configured to galvanically isolate the first and second electronic circuits and transfer information associated with the frequency of the output signal, the capacitor including:
• a substrate;
• a first electrode on the substrate, a portion of the first electrode being exposed in a contact region;
• a second electrode;
• and
• a first dielectric layer including a first dielectric region between the first electrode and the second electrode, and a second dielectric region between the first dielectric region and the contact region, the second dielectric region being contiguous to the first dielectric region, a surface of the second dielectric region defining a surface path between the second conductive layer and the contact region,
• wherein said second dielectric region has a plurality of grooves that increase a spatial extension of said surface path.

A method, comprising:

• forming, on a substrate, a first electrode including a first conductive layer;
• forming, on the substrate, a contact region by exposing a portion of the first conductive layer;
• forming a first dielectric layer on the first electrode, the first dielectric layer including a first dielectric region and a second dielectric region, the second dielectric region being contiguous to the first dielectric region and extends between the first dielectric region and the contact region;
• forming a second electrode including a second conductive layer on the first dielectric layer in the first dielectric region, a surface of the second dielectric region defining a surface path between the second conductive layer and the contact region;
• and
• forming a plurality of grooves in the second dielectric region, the plurality of grooves increase a spatial extension of said surface path.