Semiconductor image sensor
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCHUN-HAO CHUANG, KENG-YU CHOU, WEN-HAU WU, WEI-CHIEH CHIANG, CHIEN-HSIEN TSENG, KAZUAKI HASHIMOTO
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCHUN-HAO CHUANG, KENG-YU CHOU, WEN-HAU WU, WEI-CHIEH CHIANG, CHIEN-HSIEN TSENG, KAZUAKI HASHIMOTO
Estimating the term…
A BSI image sensor includes a substrate including a front side and a back side opposite to the front side, and a plurality of pixel sensors arranged in an array. Each of the pixel sensors includes a photo-sensing device in the substrate, a color filter over the pixel sensor on the back side, and an optical structure over the color filter on the back side. The optical structure includes a first sidewall, and the first sidewall and a plane substantially parallel with a front surface of the substrate form an included angel greater than 0°.
A back side illumination (BSI) image sensor comprising:
(canceled)
A back side illumination (BSI) image sensor comprising:
A back side illumination (BSI) image sensor comprising:
Dependencies are inferred from the claim text.