Substrate inverting device, substrate processing apparatus, and substrate catch-and-hold device

A substrate inverting device comprising:

• a plurality of lower guides each having a downward inclined plane that is inclined downward toward an inner side in a width direction of a substrate and that comes in contact with a peripheral edge portion of said substrate held in a horizontal position to support said substrate from below;
• a plurality of upper guides each having an upward inclined plane that is inclined upward toward the inner side in said width direction and that comes in contact with the peripheral edge portion of said substrate at a position above a position of contact between said substrate and said plurality of lower guides to catch and hold said substrate between said plurality of lower guides and said plurality of upper guides;
• an inversion mechanism that inverts said substrate that is caught and held by said plurality of lower guides and said plurality of upper guides, by rotating said plurality of lower guides and said plurality of upper guides about a central axis pointing in a horizontal direction;
• a guide moving mechanism that advances and retracts said plurality of lower guides and said plurality of upper guides between contact positions and retracted positions, said contact positions being positions at which said plurality of lower guides and said plurality of upper guides are in contact with said substrate, and said retracted positions being positions that are further away from said substrate than said contact positions;
• and
• a switching mechanism that changes states of contact between said plurality of lower guides and said substrate and between said plurality of upper guides and said substrate,
• wherein each lower guide includes a first lower contact region and a second lower contact region that are switched by said switching mechanism and selectively serve as said downward inclined plane, and
• each upper guide includes a first upper contact region and a second upper contact region that are switched by said switching mechanism and selectively serve as said upward inclined plane.