Load port apparatus and method of driving the same

A load port apparatus for connecting a main opening of a wafer transportation container with a frame opening, comprising:

• an installation part having an installation table configured to install the wafer transportation container and move to and from the frame opening;
• a frame being upright from the installation part and having the frame opening;
• a flange clamp including:
• an engagement portion configured to be engaged with a flange surrounding an outer circumference of the main opening;
• and
• a drive portion configured to drive the engagement portion;
• and
• a cover portion disposed at least at an upper part or a side part of the frame opening and at least partially covering a periphery of the frame opening,
• wherein at least when the engagement portion is stopped, the flange clamp is disposed between a periphery opposing surface of the periphery facing the flange and a cover separate surface of the cover portion located farthest from the periphery opposing surface in a transportation direction of the wafer transportation container by the installation part.

A method of driving a load port apparatus for connecting a main opening of a wafer transportation container with a frame opening, comprising:

• a step of moving an installation table installing the wafer transportation container to a dock position where the main opening moves close to the frame opening;
• and
• a step of driving an engagement portion configured to be engaged with a flange surrounding an outer circumference of the main opening by a drive portion configured to drive the engagement portion so as to engage the engagement portion with the wafer transportation container located at the dock position,
• wherein the engagement portion is engaged from above or the side with a flange groove formed in the flange and opening radially outwardly.