Electron Beam Image Acquisition Apparatus, and Electron Beam Image Acquisition Method

An electron beam image acquisition apparatus comprising:

• a deflector configured to deflect an electron beam;
• a deflection control system configured to control the deflector;
• a measurement circuitry configured to measure, while moving a stage for placing thereon a substrate on which a figure pattern is formed, an edge position of a mark pattern arranged on the stage by scanning the mark pattern with an electron beam;
• a delay time calculation circuitry configured to calculate, using information on the edge position, a deflection control delay time which is a delay time to start deflection control occurring in the deflection control system;
• a correction circuitry configured to correct, using the deflection control delay time, a deflection position of the electron beam;
• and
• an image acquisition mechanism configured to include the deflector and acquire an image of the figure pattern at a corrected deflection position on the substrate.