Ic manufacturing recipe similarity evaluation methods and systems

A method comprising:

• receiving a first set of tool-log entries based on execution of a first integrated circuit (IC) manufacturing recipe on an IC manufacturing tool;
• receiving a second set of tool-log entries based on execution of a second IC manufacturing recipe on the IC manufacturing tool;
• comparing a first tool-log entry from the first set of tool-log entries to a first tool-log entry from the second set of tool-log entries;
• and
• based on the comparison, forming an IC structure using either the first IC manufacturing recipe or the second IC manufacturing recipe.

An integrated circuit (IC) manufacturing recipe similarity evaluation system comprising:

• a processor;
• and
• a non-transitory, computer readable storage medium including computer program code for one or more programs, the non-transitory, computer readable storage medium and the computer program code being configured to, with the processor, cause the system to:
• retrieve a first set of tool-log entries and a second set of tool-log entries from a tool-log storage device, the first set of tool-log entries corresponding to executing a first IC manufacturing recipe on an IC manufacturing tool, the second set of tool-log entries corresponding to executing a second IC manufacturing recipe on the IC manufacturing tool;
• receive a tool-log variable identifying a first entry of the first set of tool-log entries and a first entry of the second set of tool-log entries;
• assign a tool-log variable similarity value for the first tool-log entry of the first set of tool-log entries and the first tool-log entry of the second set of tool-log entries;
• and
• based on the tool-log variable similarity value, calculate a recipe similarity value for the first IC manufacturing recipe and the second IC manufacturing recipe.