Polarizing element, polarizing element manufacturing method, and optical device
AssigneeDexerials Corporation
InventorTomu Takeda
Life of this patent
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Abstract
Provided is a polarizing element having a wire grid structure, including: a transparent substrate; and grid-shaped convex portions arranged on the transparent substrate at a pitch shorter than a wavelength of light in a use band and extending in a predetermined direction, wherein the grid-shaped convex portion includes a first absorption layer, a first dielectric layer, a reflection layer, a second dielectric layer, and a second absorption layer in order from the transparent substrate side. Further, an optical device including the polarizing plate is provided.
Claims17
A polarizing element having a wire grid structure, comprising:
- a transparent substrate;
- and
- grid-shaped convex portions arranged on the transparent substrate at a pitch shorter than a wavelength of light in a use band and extending in a predetermined direction,
- wherein the grid-shaped convex portion includes a first absorption layer, a first dielectric layer, a reflection layer, a second dielectric layer, and a second absorption layer in order from the transparent substrate side.
A method of manufacturing a polarizing element having a wire grid structure, comprising:
- forming a lamination structure including a first absorption layer, a first dielectric layer, a reflection layer, a second dielectric layer, and a second absorption layer in this order from the transparent substrate side on the transparent substrate;
- and
- forming grid-shaped convex portions arranged on the transparent substrate at a pitch shorter than a wavelength of light in a use band by selectively etching the lamination structure.
Dependencies are inferred from the claim text.