Back to results
US 2019/0094268 A1Published application
High range and resolution scanning probe and methods
AssigneeAdvanced Measurement Technology, Inc.
InventorCharles R. Sides
Life of this patent
Estimating the term…
Abstract
A scanning probe used to measure and determine the features of an electrically conductive surface and which can be used to determine present corrosion state of a bare or coated metal and monitor corrosion progression under coatings that previously had to be removed to assess the present corrosion state and corrosion progression of the underlying metal surface.
Claims8
An electrically conductive surface feature scanning device, for resolving surface features in atmospheric conditions, comprising:
- a probe assembly including a probe tip having a diameter of less than about 20 um;
- one or more piezoelectric control motors operable to move the probe tip in the X and Y-axes of an X-Y plane;
- a lock-in amplifier operable to separate surface feature responsive signal from background noise to provide a surface feature resolution in the micrometer range over a scan area of up to about 100 mm by 100 mm.
A scanning probe device to inspect a sample surface, the scanning probe device comprising:
- a probe assembly including a probe tip configured to measure a Contact Backing Potential (CBT) of a surface to be inspected, the probe tip having a diameter of less than about 1 um;
- a piezoelectric positioning device configured to move the probe tip over the surface in increments of about 1 um along an X-Y area up to about 100 mm by 100 mm;
- and
- a lock-in amplifier system configured to record an X-position, a Y-position, and a CBT value of the probe at each increment along the X-Y area.
1 more element
Dependencies are inferred from the claim text.