Force sensor

A force sensor comprising:

• a deformable body that is a closed-loop deformable body, the deformable body including:
• two force receiving portions;
• two fixed portions arranged together with the two force receiving portions alternately along a closed-loop path;
• and four deformable portions that connect the force receiving portions and the fixed portions adjacent to one another along the closed-loop path, and are elastically deformed by one of a force and a moment acting on the force receiving portions;
• four displacement bodies that are connected to the respective deformable portions, and are displaced by elastic deformation caused in the deformable portions;
• and
• a detection circuit that detects at least one of an applied force and an applied moment, in accordance with displacements caused in the four displacement bodies,
• wherein the four deformable portions each include:
• a tilting portion that has a longitudinal direction and is disposed between the force receiving portion and the fixed portion;
• a first deformable portion that connects the corresponding force receiving portion and the tilting portion;
• and
• a second deformable portion that connects the corresponding fixed portion and the tilting portion,
• the first deformable portion extends in a direction intersecting with the longitudinal direction on one side of the tilting portion,
• the second deformable portion extends in a direction intersecting with the longitudinal direction on the other side of the tilting portion,
• a connecting portion between the first deformable portion and the tilting portion, and a connecting portion between the second deformable portion and the tilting portion differ in position in the longitudinal direction of the tilting portion,
• the four displacement bodies are connected one by one to the respective tilting portions, and are at a distance from the respective fixed portions, the four displacement bodies each including a displacement portion that is displaced by a tilting movement of the tilting portion, and
• the detection circuit includes at least four capacitive elements disposed at least one each at the respective displacement portions, and detects at least one of an applied force and an applied moment in accordance with changes in capacitance values of the at least four capacitive elements.

A force sensor comprising:

• a deformable body that is a closed-loop deformable body, the deformable body including:
• four force receiving portions;
• four fixed portions arranged together with the four force receiving portions alternately along a closed-loop path;
• and eight deformable portions that connect the force receiving portions and the fixed portions adjacent to one another along the closed-loop path, and are elastically deformed by a force and a moment acting on the force receiving portions;
• eight displacement bodies that are connected to the respective deformable portions, and are displaced by elastic deformation caused in the deformable portions;
• and
• a detection circuit that detects at least one of an applied force and an applied moment, in accordance with displacements caused in the eight displacement bodies,
• wherein the eight deformable portions each include:
• a tilting portion that has a longitudinal direction and is disposed between the force receiving portion and the fixed portion;
• a first deformable portion that connects the corresponding force receiving portion and the tilting portion;
• and
• a second deformable portion that connects the corresponding fixed portion and the tilting portion,
• the first deformable portion extends in a direction intersecting with the longitudinal direction on one side of the tilting portion,
• the second deformable portion extends in a direction intersecting with the longitudinal direction on the other side of the tilting portion,
• a connecting portion between the first deformable portion and the tilting portion, and a connecting portion between the second deformable portion and the tilting portion differ in position in the longitudinal direction of the tilting portion,
• the eight displacement bodies are connected one by one to the respective tilting portions, and are at a distance from the respective fixed portions, the eight displacement bodies each including a displacement portion that is displaced by a tilting movement of the tilting portion, and
• the detection circuit includes at least eight capacitive elements disposed at least one each at the respective displacement portions, and detects at least one of an applied force and an applied moment in accordance with changes in capacitance values of the at least eight capacitive elements.