US 2019/0094011 A1 · THICKNESS MEASURING METHOD AND DEVICE

Abstract

The present disclosure provides a thickness measuring method and device. The thickness measuring method is used for measuring a thickness of a layer to be measured of a light-transmitting sample to be measured and comprising the steps of: placing the sample to be measured between an optical device and a metal layer, the optical device comprising a light incident surface and a light exit surface; adjusting incident light emitted to the light incident surface of the optical device so that an intensity of light exiting the light exit surface of the optical device is less than 10−12 W/m2, so as to obtain optical parameters of the incident light; and calculating a thickness of the layer to be measured according to the optical parameters of the incident light.

Claims20

Dependent claims

A thickness measuring method for measuring a thickness of a layer to be measured of a light-transmitting sample to be measured, comprising the steps of:

placing the sample to be measured between an optical device and a metal layer, the optical device comprising a light incident surface and a light exit surface;
adjusting incident light emitted to the light incident surface of the optical device so that an intensity of light exiting from the light exit surface of the optical device is less than 10−12 W/m2, so as to obtain optical parameters of the incident light;
and
calculating a thickness of the layer to be measured according to the optical parameters of the incident light.

1 more element

A thickness measuring device for measuring a thickness of a layer to be measured of a light-transmitting sample to be measured, comprising:

an optical device and a metal layer disposed oppositely, the optical device comprising a light incident surface and a light exit surface;
an emitter corresponding to the light incident surface of the optical device and configured to emit incident light toward the light incident surface;
a receiver corresponding to the light exit surface of the optical device and configured to receive an intensity of light exiting from the light exit surface;
an acquirer configured to acquire optical parameters of the incident light from the emitter in a case where the receiver receives an intensity of light exiting from the light exit surface less than 10−12 W/m2;
and
a calculator configured to calculate the thickness of the layer to be measured according to the optical parameters of the incident light.

3 more elements

Dependencies are inferred from the claim text.

Thickness measuring method and device

Life of this patent

Thickness measuring method and device

Life of this patent

Abstract

Claims20