Mems membrane with integrated transmission line

A micro-electromechanical switch (MEMS) formed on a substrate, the micro-electromechanical switch comprising:

• a first RF signal line and a second RF signal line formed on the substrate;
• a deformable membrane made from a highly resistive material, the membrane being kept, in a non-deformed state, spaced away from the substrate by anchorings moans secured to the substrate,
• an activation means configured to deform the membrane from its nondeformed state,
• a substrate track formed on the substrate, opposite the membrane,
• a membrane track integrated into the membrane and bearing a conductive contact zone opposite the substrate track configured to produce a conductive contact between the substrate track and the membrane track in a deformed state of the membrane, the first RF signal line and the second RF signal line being connected by means of at least one from among the membrane track and the substrate track, the switch being in the on state when a signal is capable of circulating from the first RF signal line to the second RF signal line, and in the off state when a signal cannot circulate from the first RF signal line to the second RF signal line,
• wherein an a membrane RF ground is integrated into the membrane, the membrane RF ground being electrically connected to an RF substrate ground by means of anchors, the membrane RF ground framing and being formed parallel to at least one from among the membrane track and the substrate track, such that the RF ground closely follows the RF signal path, to guide the propagation of the RF signal from the first RF signal line to the second RF signal line when the switch is in the on state.