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US 2019/0074175 A1Published application
Tantalum compound
AssigneeAdeka Corporation
InventorsSeung-min RYU, Takanori KOIDE, Naoki YAMADA, Jae-soon LIM, Tsubasa SHIRATORI, Youn-joung CHO
Life of this patent
Estimating the term…
Abstract
A tantalum compound, a method of forming a thin film, and a method of fabricating an integrated circuit device, the tantalum compound being represented by the following General Formula (I):
Claims21
-40. (canceled)
A tantalum compound represented by the following General Formula (I):
- wherein, in General Formula 1,
- R1, R3, and R4 are each independently a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group, or a C4 to C20 substituted or unsubstituted aromatic or alicyclic hydrocarbon group;
- and
- R2 is a hydrogen atom, a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group, or a C6 to C20 substituted or unsubstituted aromatic or alicyclic hydrocarbon group.
1 more element
A tantalum compound represented by the following General Formula (I):
- wherein, in General Formula 1,
- R1, R3, and R4 are each independently a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group;
- and
- R2 is a hydrogen atom, a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group.
1 more element
A tantalum compound including following group:
- wherein the symbol “*” represents a binding site,
- R1, R3, and R4 are each independently a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group, or a C4 to C20 substituted or unsubstituted aromatic or alicyclic hydrocarbon group;
- and
- R2 is a hydrogen atom, a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group, or a C6 to C20 substituted or unsubstituted aromatic or alicyclic hydrocarbon group.
1 more element
Dependencies are inferred from the claim text.