System And Method For Reduced Workpiece Adhesion Due To Electrostatic Charge During Removal From A Processing Station

An apparatus for determining an amount of residue deposited within a processing station, comprising:

• a platen;
• an electrostatic power supply to supply a clamping voltage to the platen;
• an electrostatic charge detection system, disposed proximate the platen to detect charge;
• and
• a control system in communication with the electrostatic charge detection system, wherein the control system:
• measures a time needed for a residual charge on the platen to dissipate to a predetermined level after the clamping voltage has been disabled;
• and
• issues a warning if the time is greater than a predetermined delay threshold.

An apparatus for determining an amount of residual charge on a workpiece being introduced to a platen in a processing station, comprising:

• an electrostatic charge detection system, disposed proximate the platen to detect charge;
• and
• a control system in communication with the electrostatic charge detection system, wherein the control system:
• detects an increase in charge when a workpiece is being introduced to the processing station;
• calculates a rate of change in charge as the workpiece is being introduced to the processing station;
• and
• compares at least one of the increase in charge and the rate of change in charge to predetermined thresholds.