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US 2019/0056674 A1Published application
Method for detecting the position of a mask holder on a measuring table
AssigneeCarl Zeiss SMT GmbH
InventorHans-Michael Solowan
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Abstract
The invention relates to a method for detecting the position of a mask holder for photolithographic masks, said method including the following steps: positioning the mask holder with the mask on a measuring table of a measurement apparatus, measuring the mask holder by use of an algorithm, storing the absolute position of the mask holder on the measuring table, and recording and storing at least one reference image.
Claims20
A method for detecting the position of a mask holder for photolithographic masks, said method comprising:
- positioning the mask holder with the mask on a measuring table of a measurement apparatus,
- measuring the mask holder by use of an algorithm, and
- storing the absolute position of the mask holder on the measuring table,
- wherein at least one reference image is recorded and stored.
1 more element
Dependencies are inferred from the claim text.