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US 2019/0056665 A1Published application
Photo-imageable thin films with high dielectric constants
OwnerCaroline Woelfle-Gupta, Yuanqiao Rao +1inventors
InventorsCaroline Woelfle-Gupta, Yuanqiao Rao, William H.H. Woodward
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Abstract
A formulation for preparing a photo-imageable film; said formulation comprising: (a) a positive photoresist comprising a cresol novolac resin and a diazonaphthoquinone inhibitor; and (b) functionalized zirconium oxide nanoparticles.
Claims7
A formulation for preparing a photo-imageable film;
- said formulation comprising:
- (a) a positive photoresist comprising a cresol novolac resin and a diazonaphthoquinone inhibitor;
- and (b) functionalized zirconium oxide nanoparticles.
Dependencies are inferred from the claim text.