Nanopatterned biosensor electrode for enhanced sensor signal and sensitivity
AssigneeInternational Business Machines Corporation
InventorEmily R. Kinser
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Abstract
Methods for forming an electrode structure, which can be used as a biosensor, are provided in which the electrode structure has non-random topography located on one surface of an electrode base. In some embodiments, an electrode structure is obtained that contains no interface between the non-random topography of the electrode structure and the electrode base of the electrode structure. In other embodiments, electrode structures are obtained that have an interface between the non-random topography of the electrode structure and the electrode base of the electrode structure.
Claims15
A method of forming an electrode structure, the method comprising:
- providing an electrode base material on a substrate;
- forming a patterned material layer on and surrounding the exposed surfaces of the electrode base material, wherein the patterned material layer contains openings that physically exposed the electrode base material;
- etching the electrode base material utilizing the patterned material layer as an etch mask to provide the electrode structure comprising a remaining portion of the electrode base material and having an electrode base shape and a nanotopography shape;
- removing the patterned material layer;
- and
- attaching a biological functionalization material to the electrode structure.
Dependencies are inferred from the claim text.