Silicon single crystal ingot cooling tube and silicon single crystal ingot growth apparatus having the same

A silicon single crystal ingot cooling tube, comprising:

• an inner wall portion for forming a hollow;
• an outer wall portion spaced apart from the inner wall portion and surrounding the inner wall portion from outside;
• a top wall portion and a bottom wall portion for sealing a space portion formed by the inner wall portion and the outer wall portion;
• at least one cooling water inlet tube located in an upper portion of the outer wall portion and introducing cooling water into the space portion;
• at least one cooling water outlet tube located in the upper portion of the outer wall portion and discharging cooling water flowing along the space portion;
• a downward guide for forming a flow path for guiding the cooling water introduced into the cooling water inlet tube to a lower portion of the space portion;
• and
• a upward guide for forming a flow path for discharging the cooling water to the cooling water outlet tube by flowing the cooling water introduced into the downward guide in a zigzag shape toward an upper portion of the space portion from the lower portion thereof.

A single crystal growth apparatus, comprising:

• a chamber;
• a crucible disposed inside the chamber and accommodating a silicon melt;
• and
• a silicon single crystal ingot cooling tube,
• wherein the silicon single crystal ingot cooling tube comprises:
• an inner wall portion for forming a hollow into which a silicon single crystal ingot is inserted;
• an outer wall portion spaced apart from the inner wall portion and surrounding the inner wall portion from outside;
• a top wall portion and a bottom wall portion for sealing a space portion formed by the inner wall portion and the outer wall portion;
• at least one cooling water inlet tube for introducing cooling water into the space portion;
• at least one cooling water outlet tube for discharging cooling water flowing along the space portion:
• and
• a cooling water flowing portion for flowing cooling water introduced along the cooling water inlet tube to an upper region of the space portion from a lower region thereof and discharging cooling water to the cooling water outlet tube, and
• wherein the silicon single crystal ingot cooling tube cools down a silicon single crystal ingot growing from the crucible.