Vapor evaporation source
AssigneeWuhan China Star Optoelectronics Semiconductor Dis play Technology Co., Ltd.
InventorXin ZOU
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Abstract
A vapor evaporation source is provided. The vapor evaporation source includes a vapor evaporation source body made of conductive material, and the vapor evaporation source body has: a main body configured with a material chamber therein; and a first electrode connection terminal and a second electrode connection terminal disposed on outer sides of the main body. The first electrode connection terminal and the second electrode connection terminal have opposite polarities. After electrification of the first electrode connection terminal and the second electrode connection terminal, the main body itself conducts electricity and generates heat to heat material inside the material chamber.
Claims17
A vapor evaporation source, comprising a vapor evaporation source body made of conductive material, wherein the vapor evaporation source body comprises:
- a main body configured with a material chamber therein;
- a first electrode connection terminal and a second electrode connection terminal disposed on outer sides of the main body, wherein the first electrode connection terminal and the second electrode connection terminal have opposite polarities, and wherein after electrification of the first electrode connection terminal and the second electrode connection terminal, the main body itself conducts electricity and generates heat to heat material inside the material chamber;
- and
- a coating layer coated on an inner wall of the material chamber to prevent vapor evaporation material from chemically reacting with material of the main body.
A vapor evaporation source, comprising a vapor evaporation source body made of conductive material, wherein the vapor evaporation source body comprises:
- a main body configured with a material chamber therein;
- and
- a first electrode connection terminal and a second electrode connection terminal disposed on outer sides of the main body, wherein the first electrode connection terminal and the second electrode connection terminal have opposite polarities, and wherein after electrification of the first electrode connection terminal and the second electrode connection terminal, the main body itself conducts electricity and generates heat to heat material inside the material chamber.
Dependencies are inferred from the claim text.