Substrate conveyance robot and substrate conveyance apparatus

A substrate conveyance robot comprising:

• a robot arm having a distal end portion to which an end effector for holding a substrate is provided;
• an elevating/lowering drive mechanism for elevating/lowering the robot arm;
• and
• a cover unit for covering the elevating/lowering drive mechanism,
• wherein the elevating/lowering drive mechanism has a fixed portion to which a guide rail extending in a vertical direction is provided, and an elevating/lowering portion which is driven to be elevated/lowered along the guide rail,
• wherein the robot arm has a base portion link which is connected to the elevating/lowering portion to be turned, and a link member which is connected to the base portion link to be turned and includes the distal end portion, and
• wherein the cover unit has a fixed-side cover which is provided to the fixed portion and in which the elevating/lowering portion moves, and a guide rail cover which is provided to the elevating/lowering portion for covering an upper portion of the guide rail which is exposed when the elevating/lowering portion is lowered.