Treatment fluid extracting device and etching device comprising the latter

Abstract

The invention relates to a suction-extraction apparatus for extracting a treatment fluid by suction from an essentially planar treatment surface (3a) of treatment substrates (3) transported by means of transporting rollers (8, 10) along an essentially horizontal transporting direction, having a suction source, having a suction-extraction-control unit, which activates the same, and having a suction-extraction-tube unit, which is connected to the suction source and has at least one suction-extraction lance, which can have one or more entry-side suction-extraction-nozzle openings positioned at a suction-extraction distance from the treatment surface. The invention also relates to an etching apparatus equipped with such a suction-extraction apparatus. In the case of a suction-extraction apparatus according to the invention, the suction source and the suction-extraction-control unit are designed for a suction-volume flow per suction-extraction lance of at least 30 m3/h and a negative suction pressure of no more than 8 kPa. In addition, or as an alternative, the suction-extraction lance has a comb-like suction-extraction structure with a suction-extraction-collecting tube (17) and a plurality of suction-extraction tubes (18) which extend in a comb-like manner from said collecting tube and have the suction-extraction-nozzle openings (19) on the entry side. Use, for example, for etching printed circuit boards, conductor foils or semiconductor wafers.

Dependencies are inferred from the claim text.