Crosslinkable polymeric materials for dielectric layers in electronic devices
AssigneeAltana AG
InventorsMartin Eggert, Stephan Feser, Sascha Tödter-König
Life of this patent
Estimating the term…
Abstract
Compositions for providing a dielectric layer in an electronic device wherein the composition comprises a polymer which polymer contains one or more building blocks, wherein at least 25 mol % of the total number of building blocks in the polymer are of the general formula having olefinic oligo-dihydrodicyclopentadienyl functionalities.
Claims15
Composition for providing a dielectric layer in an electronic device which composition comprises a polymer which polymer contains one or more units, wherein at least 25 mol % of the total number of units in the polymer are the following units (A) with crosslinkable side groups,
- in which
- X independently at each occurrence is a methylene group or oxygen,
- R independently at each occurrence is a methyl group or hydrogen,
- L1 is a divalent group which connects the polymer chain to the side group and
- L2 is a divalent group which connects the polymer chain to the side group, or is hydrogen,
- with the proviso that if L2 is hydrogen, the side group in question is absent.
Method for preparing an electronic device which has at least one dielectric layer, the preparation of the dielectric layer comprising or consisting of steps a) to c):
- a) deposition of a formulation which comprises
- i) at least one polymer which polymer contains one or more units, wherein at least 5 mol % of the total number of units in the polymer are the following units (A) with crosslinkable side groups,
- in which
- X independently at each occurrence is a methylene group or oxygen,
- R independently at each occurrence is a methyl group or hydrogen,
- L1 is a divalent group which connects the polymer chain to the side group and
- L2 is a divalent group which connects the polymer chain to the side group, or is hydrogen,
- with the proviso that if L2 is hydrogen, the side group in question is absent.
- ii) at least one photoinitiator and
- iii) at least one organic solvent
- on a substrate,
- b) removal of the solvent,
- c) photocrosslinking of the resulting layer by actinic radiation.
Dependencies are inferred from the claim text.