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US 2018/0323372 A1Published application
Segmented print bar for large-area ovjp deposition
AssigneeUniversal Display Corporation
InventorsWilliam E. QUINN, Gregory MCGRAW, Gregg KOTTAS
Life of this patent
Estimating the term…
Abstract
OVJP print bars are provided that include multiple print head segments, each of which includes a print head and which can be positioned relative to the substrate independently of each other print head segment. Accordingly, a more consistent head-to-substrate distance can be maintained even for substrates that are not uniformly planar.
Claims20
A print bar for organic vapor jet (OVJP) deposition, the print bar comprising:
- a plurality of print head segments, each of the plurality of print head segments comprising an OVJP print head;
- a plurality of fly height distance sensors, each of the plurality of fly height distance sensors configured to measure a distance between a substrate disposed below the print bar and a portion of at least one of the print head segments;
- and
- a plurality of actuators configured to adjust a position and/or orientation of one or more of the plurality of print head segments based upon one or more distances between the substrate and the print bar measured by one or more of the plurality of fly height distance sensors.
1 more element
A method of fabricating a device using organic vapor jet (OVJP) deposition, the method comprising:
- operating a plurality of print head segments to deposit material on a substrate, each of the plurality of print head segments comprising an OVJP print head;
- receiving distance measurements from each of a plurality of fly height distance sensors, each of the plurality of fly height distance sensors configured to measure a distance between a substrate disposed below the print bar and a portion of at least one of the print head segments;
- and
- actuating one or more actuators of a plurality of actuators to adjust a position and/or orientation of one or more of the plurality of print head segments based upon one or more of the distance measurements.
1 more element
Dependencies are inferred from the claim text.