Piezoelectric vibrator and sensor
AssigneesPiezo Studio Inc., Tohoku University
InventorsAkira YOSHIKAWA, Yuji OHASHI, Yuui YOKOTA, Kei KAMADA, Masatoshi ITO, Kenji INOUE, Hiroyuki AMANO
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AssigneesPiezo Studio Inc., Tohoku University
InventorsAkira YOSHIKAWA, Yuji OHASHI, Yuui YOKOTA, Kei KAMADA, Masatoshi ITO, Kenji INOUE, Hiroyuki AMANO
Estimating the term…
To provide a vibrator made of a piezoelectric crystal having a larger electromechanical coupling coefficient and a more satisfactory frequency-temperature characteristic than those of quartz, a vibrating piece (101) is made of a Ca3Ta(Ga1-xAlx)3Si2O14 single crystal (0<x≤1). In the single crystal, letting θ be a rotation angle from an X-Z plane about an X-axis serving as a rotation axis, 18x+17.5≤θ≤24x+24.5 is set. In addition, the vibrating piece (101) is made of a Ca3Nb(Ga1-xAlx)3Si2O14 single crystal (0<x≤1). In the single crystal of this arrangement, letting θ be a rotation angle from an X-Z plane about an X-axis serving as a rotation axis, 25x+23.083≤θ≤32x+26.167 is set.
A piezoelectric vibrator comprising at least one vibrating piece made of a Ca3Ta(Ga1-xAlx)3Si2O14 single crystal (0<x≤1),
A piezoelectric vibrator comprising at least one vibrating piece made of a Ca3Nb(Ga1-xAlx)3Si2O14 single crystal (0<x≤1),
A piezoelectric vibrator comprising at least one vibrating piece made of a Ca3(Ta1-yNby)(Ga1-xAlx)3Si2O14 single crystal (0<x≤1, 0≤y≤1),
Dependencies are inferred from the claim text.