Illumination device for desorbing molecules from inner walls of a processing chamber
AssigneeApplied Materials, Inc.
InventorRicardo Mateo Ramirez, III
Life of this patent
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Abstract
An illumination device is described for desorbing molecules from inner walls of a processing chamber. In some examples, the device includes a chassis, a plurality of light emitting diodes (LEDs) mounted to the chassis, wherein the plurality of LEDs emit ultraviolet (UV) radiation when electrically powered, a thermally non-conductive main housing surrounding the chassis and configured to be placed on a wafer carrier of the processing chamber, and an electrical system to activate the LEDs within the processing chamber.
Claims19
A desorption device for a processing chamber, the device comprising:
- a chassis;
- a plurality of light emitting diodes (LEDs) mounted to the chassis, wherein the plurality of LEDs emit ultraviolet (UV) radiation when electrically powered;
- a thermally non-conductive main housing surrounding the chassis and configured to be placed on a wafer carrier of the processing chamber;
- and
- an electrical system to activate the LEDs within the processing chamber.
-17. (canceled)
An apparatus comprising:
- a processing chamber with vacuum seals;
- a vacuum pump to evacuate the chamber;
- an access door to insert a wafer;
- and
- a desorption device accessible through the access door, the device including a chassis, a plurality of light emitting diodes (LEDs) mounted to the chassis, wherein the plurality of LEDs emit ultraviolet (UV) radiation when electrically powered, a thermally non-conductive main housing surrounding the chassis and configured to be placed on a wafer carrier of the processing chamber, and an electrical system to activate the LEDs within the processing chamber.
Dependencies are inferred from the claim text.