Thin film transistor, display substrate, methods for manufacturing the same and display device
AssigneeBoe Technology Group Co., Ltd.
InventorWei Liu
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AssigneeBoe Technology Group Co., Ltd.
InventorWei Liu
Estimating the term…
A thin film transistor, a display substrate, manufacturing methods thereof, and a display device are provided. The manufacturing method for the thin film transistor includes: forming a light-shielding metal pattern and a source-drain metal layer pattern on a base substrate; forming a buffer layer including first and second via-holes; forming a source electrode connected with the light-shielding metal pattern via the first via-hole, a drain electrode connected with the source-drain metal layer pattern via the second via-hole, and an active layer, an orthographic projection of the light-shielding metal pattern on the substrate completely covering that of the active layer on the substrate and at least partially covering those of the source and drain electrodes on the substrate; and forming a gate insulation layer and a gate electrode, orthographic projections of the gate insulation layer and the gate electrode on the substrate being identical.
A method for manufacturing a thin film transistor, comprising:
A thin film transistor, comprising:
Dependencies are inferred from the claim text.